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Delta-doping of Semiconductors
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基本介绍
作者: Schubert, E. F. 编
出版年: 2005-8
页数: 620
定价: $ 135.60
ISBN: 9780521017961
书本简介
This book is the first to give a comprehensive review of the theory, fabrication, characterisation, and device applications of abrupt, shallow, and narrow doping profiles in semiconductors. Such doping profiles are a key element in the development of modern semiconductor technology. After an introductory chapter setting out the basic theoretical and experimental concepts involv...
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